PECVD deposition system
Single type and continual type for thin film and crystalline solar cell with features as below:
1. Box type deposition system.
2. Multi-models for depositing 24,48,72 pieces of glass substrates at the same time.
3. Multi-models are suitable for different sizes of glass.
4. MF sputtering power for rapid and steady deposition.
5. Well gas isolation device to guarantee coating steady and even.
6. Innovative heating system to guarantee coating even and lower energy consumption.
7. Automatic control system, maintain easy operation and steady.
8. Easy operation and maintenance.